Semiconductor

In the semiconductor industry, the application of fluoroplastic joints and pipelines is crucial for ensuring the stability of production processes, product quality, and purity.

High purity chemicals

Fluoroplastic joints and pipelines are widely used for transporting and processing high-purity chemicals. In the semiconductor manufacturing process, various high-purity chemicals such as acids, bases, solvents, etc. need to be used. Fluoroplastic joints and pipelines are ideal choices due to their excellent corrosion resistance and low solubility, which can effectively transport and handle these chemicals while preventing impurity pollution. In addition, fluoroplastics have lower surface energy, which can reduce the residue and adhesion of chemicals in pipelines, ensuring the purity of chemicals.

Gas delivery

Fluoroplastic joints and pipelines play an important role in gas delivery systems in semiconductor manufacturing. In semiconductor production, precise control and transportation of various gases, including inert gases and reactive gases, are required. Fluoroplastic joints and pipelines are often used in gas transportation systems due to their high purity, corrosion resistance, and chemical inertness to maintain gas purity and avoid the introduction of impurities.

Photolithography process

Lithography is one of the Committed step in semiconductor manufacturing process, which is used for pattern transfer and micro structure manufacturing. In the lithography process, fluoroplastic joints and pipelines play an important role in transporting lithography solution, developer, washing solvents, etc. The corrosion resistance and high purity of fluoroplastics ensure that these chemicals can be effectively treated during the photolithography process to ensure process stability and product quality.

Etching process

In semiconductor etching processes, strong acids or bases are required to remove surface impurities or create fine structures. Fluoroplastic joints and pipelines can be used for transporting and processing etching solution. Due to its excellent corrosion resistance, fluoroplastics can withstand the erosion of strong acids and alkalis, while preventing impurity pollution and pipeline corrosion, ensuring the stability and purity of the process.

Chemical vapor deposition (CVD) and Physical vapor deposition (PVD) processes

CVD and PVD are commonly used semiconductor thin film deposition processes. In these processes, fluoroplastic joints and pipelines can be used to transport deposited gases and reactants. The chemical inertness and corrosion resistance of fluoroplastics can ensure the stability and reliability of the deposition process, while avoiding the introduction of impurities.

Cleaning process

Cleaning processes are also crucial in semiconductor manufacturing. Multiple cleaning processes are used to remove residual particles, organic matter, and metal ions. Fluoroplastic joints and pipelines are widely used in cleaning systems for conveying and processing cleaning solutions, deionized water, and pure water. The chemical inertness and corrosion resistance of fluoroplastics ensure the stability and effectiveness of the cleaning process.

Fluoroplastic joints and pipelines have a wide range of applications in the semiconductor industry, covering various aspects such as high-purity chemical transportation, gas transportation, photolithography and cleaning processes. The corrosion resistance, high purity, chemical inertness, and low solubility of fluoroplastics make them an ideal material choice in semiconductor processes. By using fluoroplastic joints and pipelines, the stability of the production process, product quality, and purity requirements can be ensured to be met.