Ultra-High Purity Low Pressure Manual Diaphragm Valve DLM

Ultra-High Purity Low Pressure Manual Diaphragm Valve DLM

The DLM Series Ultra-High Purity Low Pressure Manual Diaphragm Valve is designed for the delivery of high-purity gases under low-pressure conditions in the semiconductor industry. Featuring a compact design and high CV value, this valve ensures reliable performance in critical applications. Manufactured in high-standard cleanrooms, the valve undergoes EP (electropolishing) treatment on internal surfaces, achieving a surface roughness of Ra ≤ 5 μin. Each unit is rigorously tested with helium mass spectrometry to guarantee leak-tight integrity and safety.

Materials

• Body: SS316L, SS316L VAR, SS316L VIM/VAR

• Seat: PCTFE, PFA, PI

• Diaphragm: Cobalt-based superalloy, Hastelloy C-22, SS316L

Operating Temperature

• PCTFE: -10°C to 80°C

• PFA/PI: -10°C to 150°C

Maximum Operating Pressure: 300 psi (20.7 Bar)

Leak Rates

• Internal Leak Rate: ≤ 1.0 x 10⁻⁹ Pa·m³/sec He

• External Leak Rate: ≤ 1.0 x 10⁻⁹ Pa·m³/sec He

Specifications

• Sizes: 1/4”, 3/8”, 1/2”, 3/4”

• CV Value (Flow Coefficient):

• 1/4”: 0.27

• 3/8”: 0.27–0.7

• 1/2”: 0.7

• 3/4”: 1.7

Internal Surface Roughness

• BA Grade: Ra ≤ 10 μin (0.25 μm)

• EP Grade: Ra ≤ 5 μin (0.13 μm)

Connection Options

• VCR Male

• VCR Female

• Tube Fitting

• Butt Weld Fitting

Applications

• Semiconductor manufacturing (high-purity gas delivery)

• Pharmaceutical and biotechnology systems

• Analytical instrumentation requiring ultra-clean fluid control

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