Ultra-high Purity High Pressure Manual Diaphragm Valve DHM

Ultra-High Purity High Pressure Manual Diaphragm Valve DHM

The DHM series ultra-high purity high-pressure manual diaphragm valve is designed for high-purity gas delivery under high-pressure conditions in the semiconductor industry. The product features a compact design while achieving a high CV value. Manufactured in high-standard cleanrooms, the valve's internal surfaces undergo EP (electropolishing) treatment, achieving a surface roughness of Ra ≤ 5 μin. Each product undergoes helium mass spectrometry leak testing to ensure application safety.

Materials

• Body: SS316L, SS316L VAR, SS316L VIM/VAR

• Seat: PCTFE, PFA, PI

• Diaphragm: Cobalt-based superalloy, Hastelloy C-22, SS316L

Operating Temperature

• PCTFE: -10°C to 80°C

• PFA/PI: -10°C to 150°C

Maximum Operating Pressure: 3500 psi (240 Bar)

Leak Rates

• Internal Leak Rate: ≤ 1.0 x 10^-9 Pa･m³/sec He

• External Leak Rate: ≤ 1.0 x 10^-9 Pa･m³/sec He

Specifications

• Sizes: 1/4”, 3/8”, 1/2”

• CV Value (Flow Coefficient): 0.27

Internal Surface Roughness

• BA Grade: Ra ≤ 10 μin (0.25 μm)

• EP Grade: Ra ≤ 5 μin (0.13 μm)

Connection Options: VCR Male, VCR Female, Tube Fitting, Butt Weld Fitting

Pneumatic Operation Option: Normally Closed (NC)