Stainless steel high-purity filter - FVSC

Stainless Steel High-Purity Filter FVSC

The FVSC series stainless steel high-purity filter uses a high-temperature sintered filter element, suitable for filtering high-purity liquids and gases with a minimum filtration accuracy of 0.1 μm. The compact and lightweight design makes it ideal for clean gas processing in the semiconductor industry, where space is highly constrained.

Materials:

• Inlet Valve Body: SS316L

• Outlet Valve Body: SS316L

• Sintered Filter Element: SS316L

• Gasket: Silver-plated SS316

• Spring: SS316

Operating Specifications:

• Temperature Range: -10°C to 80°C

• Maximum Operating Pressure: 3000 psi (207 bar)

• External Leak Rate: ≤1.0×10⁻⁹ Pa･m³/sec He

Internal Surface Roughness:

• BA Grade: Ra ≤10 μin (0.25 μm)

• EP Grade: Ra ≤5 μin (0.13 μm)

Filtration Accuracy Options:

Sintered Filtration Precision: 0.1, 0.5, 2, 7, 15, 40, 60, 90 μm, etc.

Connection Options:

Connections: VCR Male, Tube Fitting