Ultra-High Purity Low/Medium Flow Single-Stage Pressure Regulator PRLI

The PRLI series ultra-high purity low-flow single-stage pressure regulator features a mono-diaphragm hard-seal design, ultra-low leak rates, and internal EP electropolishing for exceptionally smooth surface finishes. It supports high-pressure input (up to 3500 psi) with stable low-pressure output, making it ideal for high-purity gas applications in the semiconductor industry. Each regulator undergoes individual pressure testing, helium mass spectrometry leak testing, and particle contamination inspection before shipment.

Materials

• Body: SS316L, SS316L VAR, Hastelloy C-22

• Seat: PCTFE / PI

• Diaphragm & Poppet: Hastelloy C-22, SS316L

Temperature

• PCTFE: -40°C to 80°C

• PI: -26°C to 177°C

Leak Rates

• Internal Leak Rate: ≤ 2.0 × 10⁻¹⁰ Pa·m³/sec (He)

• External Leak Rate: ≤ 2.0 × 10⁻⁹ Pa·m³/sec (He)

• Seat Leak Rate: ≤ 4.0 × 10⁻⁸ Pa·m³/sec (He)

Surface Roughness

• BA Grade: Ra ≤ 10 μin (0.25 μm)

• EP Grade: Ra ≤ 5 μin (0.13 μm)

Installation Options

• Rear-mount

• Panel-mount

Pressure Specifications

• Max Inlet Pressure: 3500 psi (241 bar)

• Outlet Pressure Range: 1–150 psi (see selection table)

• Proof Pressure: 150% of working pressure

• Burst Pressure: 300% of working pressure

Connection Options

• VCR Male

• VCR Female

  Tube Weld (Butt Weld Fitting)

   

  Code	Inlet Pressure	Outlet Pressure	Connection Type	A(mm)
  PRLI1004M/F	Vacuum-300psi (21bar)	1-10psi (0.07-0.7bar)	1/4"VCR M/F	94
  PRLI3004M/F	Vacuum-3500psi (241bar)	1-30psi (0.07-2.0bar)	1/4"VCR M/F	94
  PRLI6004M/F	Vacuum-3500psi (241bar)	2-60psi (0.14-4.0bar)	1/4"VCR M/F	94
  PRLI10004M/F	Vacuum-3500psi (241bar)	2-100psi (0.14-7.0bar)	1/4"VCR M/F	94
  PRLI15004M/F	Vacuum-3500psi (241bar)	5-150psi (0.34-10.0bar)	1/4"VCR M/F	94
  PRLI1006M/F	Vacuum-300psi (21bar)	1-10psi (0.07-0.7bar)	3/8"VCR M/F	119
  PRLI3006M/F	Vacuum-3500psi (241bar)	1-30psi (0.07-2.0bar)	3/8"VCR M/F	119
  PRLI6006M/F	Vacuum-3500psi (241bar)	2-60psi (0.14-4.0bar)	3/8"VCR M/F	119
  PRLI10006M/F	Vacuum-3500psi (241bar)	2-100psi (0.14-7.0bar)	3/8"VCR M/F	119
  PRLI15006M/F	Vacuum-3500psi (241bar)	5-150psi (0.34-10.0bar)	3/8"VCR M/F	119
  PRLI1004W	Vacuum-300psi (21bar)	1-10psi (0.07-0.7bar)	1/4"Tube Weld	75
  PRLI3004W	Vacuum-3500psi (241bar)	1-30psi (0.07-2.0bar)	1/4"Tube Weld	75
  PRLI6004W	Vacuum-3500psi (241bar)	2-60psi (0.14-4.0bar)	1/4"Tube Weld	75
  PRLI10004W	Vacuum-3500psi (241bar)	2-100psi (0.14-7.0bar)	1/4"Tube Weld	75
  PRLI15004W	Vacuum-3500psi (241bar)	5-150psi (0.34-10.0bar)	1/4"Tube Weld	75
  PRLI1006W	Vacuum-300psi (21bar)	1-10psi (0.07-0.7bar)	3/8"Tube Weld	75
  PRLI3006W	Vacuum-3500psi (241bar)	1-30psi (0.07-2.0bar)	3/8"Tube Weld	75
  PRLI6006W	Vacuum-3500psi (241bar)	2-60psi (0.14-4.0bar)	3/8"Tube Weld	75
  PRLI10006W	Vacuum-3500psi (241bar)	2-100psi (0.14-7.0bar)	3/8"Tube Weld	75
  PRLI15006W	Vacuum-3500psi (241bar)	5-150psi (0.34-10.0bar)	3/8"Tube Weld	75