Ultra-High Purity Low Flow Single-Stage Pressure Regulator PRL

The PRL series ultra-high purity low flow single-stage pressure regulator features a mono-diaphragm hard-seal design with ultra-low leakage rates, internal EP electropolishing treatment, and extremely smooth internal surface finish. Specially designed for high-purity gas applications in the semiconductor industry, it delivers exceptional repeatability, stability and sensitivity. Each regulator undergoes individual pressure testing, helium mass spectrometry leak testing, and particle inspection before shipment.

Materials:

• Body: SS316L, SS316L VAR

• Seat: PCTFE/PI

• Diaphragm & Poppet: Hastelloy C-22, SS316L

Operating Temperature:

• PCTFE: -40~80°C

• PI: -26~177°C

Leak Rates:

• Internal leakage: ≤2.0×10⁻¹⁰ Pa·m³/sec He

• External leakage: ≤2.0×10⁻⁹ Pa·m³/sec He

• Seat leakage: ≤4.0×10⁻⁸ Pa·m³/sec He

Surface Roughness:

• BA grade: Ra≤10μin (0.25μm)

• EP grade: Ra≤5μin (0.13μm)

Mounting Options:

• Rear mounting

• Panel mounting

Pressure Specifications:

• Maximum inlet pressure: 300psi (20.7Bar)

• Outlet pressure: 100mmHg - 10psi

• Proof pressure: 150% of working pressure

• Burst pressure: 300% of working pressure

Connection Options:

• VCR male

• VCR female

• Tube weld fitting