Ultra-High Purity Low Pressure Pneumatic Diaphragm Valve DLP

Ultra-High Purity Low Pressure Pneumatic Diaphragm Valve DLP

The DLP Series Ultra-High Purity Low Pressure Pneumatic Diaphragm Valve is designed for the delivery of high-purity gases under low-pressure conditions in the semiconductor industry. The product features a compact design while achieving a high CV value. Manufactured in high-standard cleanrooms, the valve's internal surfaces undergo EP (electropolishing) treatment, achieving a surface roughness of Ra ≤ 5 μin. Each product undergoes helium mass spectrometry leak testing to ensure application safety.

Materials

• Body: SS316L, SS316L VAR, SS316L VIM/VAR

• Seat: PCTFE, PFA, PI

• Diaphragm: Cobalt-based superalloy, Hastelloy C-22, SS316L

Operating Temperature

• PCTFE: -10°C to 80°C

• PFA/PI: -10°C to 150°C

Maximum Operating Pressure: 250 psi (17.2 bar)

Leak Rates

• Internal Leak Rate: ≤ 1.0 x 10^-9 Pa･m³/sec He

• External Leak Rate: ≤ 1.0 x 10^-9 Pa･m³/sec He

Specifications

• Sizes: 1/4”, 3/8”, 1/2”, 3/4”

• CV Value (Flow Coefficient):

• 1/4”: 0.27

• 3/8”: 0.27-0.7

• 1/2”: 0.7

• 3/4”: 1.7 

Internal Surface Roughness

• BA Grade: Ra ≤ 10 μin (0.25 μm)

• EP Grade: Ra ≤ 5 μin (0.13 μm)

Connection Options:

• VCR Male

• VCR Female

• Tube Fitting

• Butt Weld Fitting

Pneumatic Operation Options:

• Normally Closed (NC)

• Normally Open (NO)

•