Ultra-Pure High-Pressure Pneumatic Diaphragm Valve DHP

Ultra-Pure High-Pressure Pneumatic Diaphragm Valve (DHP)

The DHP series ultra-pure high-pressure pneumatic diaphragm valve is designed for the delivery of high-purity gases under high-pressure conditions in the semiconductor industry. The product achieves a high CV value while maintaining a compact design. Manufactured in high-standard cleanrooms, the valve features an EP (electropolished) internal surface with a roughness of Ra ≤5 μin. Each product undergoes helium mass spectrometry leak testing to ensure application safety.

Materials:

• Valve Body: SS316L, SS316L VAR, SS316L VIM/VAR

• Valve Seat: PCTFE, PFA, PI

• Diaphragm: Cobalt-based super alloy, Hastelloy C-22, SS316L

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Operating Specifications:

• Temperature Range:

• PCTFE: -10°C to 80°C

PFA/PI: -10°C to 150°C

• Maximum Operating Pressure: 3500 psi (240 Bar)

• Internal Leak Rate: ≤1.0×10⁻⁹ Pa･m³/sec He

• External Leak Rate: ≤1.0×10⁻⁹ Pa･m³/sec He

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Specifications:

• Sizes: 1/4”, 3/8”, 1/2”

• CV Value (Flow Coefficient): 0.27 (for all sizes)

• Internal Surface Roughness:

• BA Grade: Ra ≤10 μin (0.25 μm)

• EP Grade: Ra ≤5 μin (0.13 μm)




Connection Options:

• Connections: VCR Male, VCR Female, Tube Fitting, Butt Weld Fitting

• Pneumatic Operation: Normally Closed (NC)